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Non-Profit Organisation

INESC MN - Instituto de Engenharia de Sistemas e Computadores – Microsistemas e Nanotecnologias

Address

Rua Alves Redol, 9
1000-029Lisbon
Portugal

Description

INESC Microsistemas e Nanotecnologias is a private, non-profit Research and Development Institute created in January, 2002 from the former Solid State Technology group of INESC which existed since 1992. Since January 2020, INESC MN belongs to the Associated Laboratory -  Institute for Health and Bioeconomy -i4HB- to work in the emerging fields of Nanotechnology and BioNanotechnology.

INESC MN is dedicated to leading edge research and development in strategic technological areas of micro- and nanotechnologies and the application of these technologies to electronic, biological and biomedical devices. INESC-MN research work shares the laboratories and class 100/10 clean room facilities used for student training. An important part of INESC MN’s mission is to provide advanced training at Master, PhD and post-doctoral levels, acting as a bridge between the Instituto Superior Tecnico (IST, Universidade de Lisboa) and industrial partners worldwide. INESC-MN also offers transfer of technology to both Portuguese and international industries through collaborative research, contract research, prototyping and consulting.

INESC MN provides cleanroom microfabrication and prototyping services to industrial and SME clients through:

  • contract research and development
  • collaborative research within a joint National or European project
  • individual services according to the client’s needs

Innovation services provided by INESC MN include:

  • development and prototyping of materials, devices or systems
  • cleanroom microfabrication or nanofabrication processes
  • consulting on materials and device design
  • training of personnel in micro and nanofabrication and microfluidic devices
  • small series production of prototype chips

Regional, national or European networks that INESC MN is part of:

  • Rede Nacional de Infraestruturas  - Portuguese Research Infrastructure Network, within the Micro&NanoLab@PT
  • Spintronic Factory – more than 40 EU industrial and academic partners with activities on magnetics.
  • Centro de Tecnologia e Inovação - INESC MN was recently designated a CTI to promote technology transfer and innovation to Industry
  • Microfluidics Association - promotes the development of the Microfluidics Industry supply chain
  • Battery Cluster Portugal –promote synergies between academic, research, and industrial institutions in Portugal in the entire battery-related value chain
  • Health Cluster Portugal – Network of Portuguese stakeholders working in Health-related areas of research and innovation.

 

URL: www.inesc-mn.pt

 

INESC MN - Instituto de Engenharia de Sistemas e Computadores – Microsistemas e Nanotecnologias

INESC MN - Instituto de Engenharia de Sistemas e Computadores – Microsistemas e Nanotecnologias

Contact Person

Virginia CHU
vchu@inesc-mn.pt

Equipment

INESC MN has a Class 10/100 cleanroom (~200 m2) with a Class 10.000 grey area (~200 m2) for support and laboratorial equipment. INESC MN also has an additional 170 m2 of laboratory space for materials and device characterization as well as microfluidic processing.  

A list of the equipment available at INESC MN include:

LITHOGRAPHY

  • Photolithography - Heidelberg 2.0 DWL
  • Mask Aligner 6'' - SUSS Microtec MA6 Gen2
  • Mask aligner 4'' - Kub-2 UV
  • Electron Beam Lithography - Raith 150 System
  • PR Coater/Developer Track - SVG track
  • Spin Coater -Laurell

FILM DEPOSITION

  • Ion Beam Deposition - N3600, N3000
  • Magnetron sputtering system - Alcatel
  • PECVD - Oxford PlasmaPro 100
  • PECVD - Aixtron Black Magic 2''
  • Magnetron Sputtering System - UHV-I
  • RF Sputtering System - UHV-II
  • Magnetron & RF Sputtering - N8800, N7000, N2000

ETCHING

  • Etch System - SPTS Omega ICP
  • Ion Beam Milling - N3600, N3000
  • Plasma Etcher System - LAM Research Rainbow

MICROFABRICATION AND CHARACTERIZATION

  • Grinder/Polisher - Bruehler EcoMet 250
  • Automatic dicing saw - Disco DAD 321
  • Extrusion based 3D printing – FDM system
  • Magnetic annealing setup
  • Milling - MiniTech and Supertech 3D CNC System
  • Plasma Cleaner - PDC-002CE Harrick Plasma
  • UVO-cleaner - Model 144AX series, Jelight
  • Vapor Prime Oven - Yield Engineering YES 15 HMDS
  • Wire Bonding Systems - Kulicke & Soffa/ ASM AB559A auto
  • Wet Benches
  • Profilometer - Dektak-XT Advanced System
  • Spectral Ellipsometer – SEMILAB
  • ElectroMagnetic characterization: VSM Microsense, Wafer prober 200mm, Noise spectral, several R(H) setups

MICROFLUIDICS AND BIO-LABORATORY

  • MEMERT Ovens
  • Oxygen Plasma Cleaner - Harrick Plasma
  • Incubator - Scientific Heratherm
  • pH meter - Mettler Toledo
  • Syringe pumps (microfluidics, high pressure, double direction)
  • Corona BD-20 discharge system, Electro-Technic

Services

INESC MN provides cleanroom microfabrication and prototyping services to industry, SMEs, research institutes and university groups both inside Portugal and around the world. The types of services we provide include:

THIN FILM DEPOSITION AND DEVELOPMENT

  • Magnetic thin films and multilayers
  • Transparent electronics (ITO, IZO, AZO, SiO2, MgO, TiO2)
  • Oxide and nitride thin films (SiO2, SiNx, AlN, TaN, MgO, TiO2)
  • Thin film semiconductors (a-Si:H, nc-Si, alloys with carbon, doped layers)

MATERIALS AND DEVICE CHARACTERIZATION

  • Magnetic characterization
  • Optical and optoelectronic characterization
  • Optical and fluorescence microscopy
  • Scanning electron microscopy
  • Profilometry and ellipsometry

DEVICE AND SYSTEM PROTOTYPING

  • Magneto resistive sensors
  • Magnetic devices
  • MEMS
  • Micro-electrodes
  • Magnetic surface scanners
  • Microfluidic devices
  • Biosensors and Lab on Chip systems
  • Sensors on CMOS

Other activities

Advanced training
Technology transfer
Fast prototyping
Consulting

Service for Industry and SMEs

Yes

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