- Upper organisation
- VTT Technical Research Centre of Finland and Aalto University
- Address
Tietotie 3
FI-2150Espoo
Finland
Description
VTT Micronova facility is a micro & nano-electronic research facility located in Espoo Finland that is jointly operated with Aalto University. The facility is the main hub for R&D services in MEMS & micro-electronics including technology development, product development and manufacturing process development services. As well as publicly funded research, VTT conducts private contract research with global companies and SMEs. Micronova also houses 15+ SME companies who develop and make their products in the facility, usually based on technologies that have been previously developed in VTT
VTT MICRONOVA
VTT MICRONOVA
Contact Person
Tauno Vähä-Heikkilä
Vice President Microelectronics and Quantum
Tauno.Vaha-Heikkila@vtt.fi
Tauno.Vaha-Heikkila@vtt.fi
Equipment
The facility consists of two large semiconductor manufacturing cleanrooms and a number of other laboratories for processing, testing and characterization of micro and nano-electronic devices. The cleanrooms contain semiconductor processing equipment for lithography, etching and deposition as well as test and measuring equipment such as SEMs. In total there are some 200+ pieces of equipment that are used across a range of technology platforms.
Services
In addition to R&D services, Micronova offers training, education and small scale manufacturing. R&D services include design, prototypes, process development and characterization
Activities
Electronic and optical functional materials Optoelectronics (optical networks, optical sensors) Power electronics Memory and storage Optical components & systems OtherOther activities
• Small scale manufacturing services through VTT Memsfab and cleanroom usage by tenant companies.
• Industry networking events and seminars on relevant technology topics
VTT is an applied research institute so typically operates on developing technologies between TRL levels 3-7, however some selected work may extend into higher TRLs on certain customer contracts
Technology Readiness Levels
TRL 3: Experimental proof of concept TRL 4: Technology validated in lab TRL 5: Technology validated in relevant industrial environment TRL 6: Technology demonstrated in relevant industrial environment TRL 7: System prototype demonstration in operational environmentService for Industry and SMEs
Yes